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[期刊论文] 作者：M.P. LeBlanc,
来源：Acta Metallurgica Sinica(English Letters) 年份：2005
Multilayer thin films of TiN/SiNx have been deposited onto heated Si 100 substra tes (200℃) by reactive dc-magnetron sputtering from Ti and Si targets in an Ar...
[期刊论文] 作者：M.P. LeBlanc,Z.F. Zhou,Y.G. Sh,
来源：金属学报（英文版） 年份：2004
Multilayer thin films of TiN/SiNx have been deposited onto heated Si 100 substrates (200℃) by reactive dc-magnetron sputtering from Ti and Si targets in an Ar-...
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