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[会议论文] 作者：Ahn,Hong-Young Chang,
来源：2011年第三届微电子及等离子体技术国际会议 年份：2011
Transformer Coupled Plasma(TCP) is different from well known Inductively Coupled Plasma(ICP),because the former has a magnetic core between the primary coil and the secondary coil....
An experimental study on a large area multi-electrode discharge in the fabrication of microcrystalli
[会议论文] 作者：Lee,Hong-Young Chang,
来源：2011年第三届微电子及等离子体技术国际会议 年份：2011
Recently,there have been many research for higher deposition rate (DR) and good uniformity of μc-Si:H film in large-area discharge....
[会议论文] 作者：Byung-Keun Na,Kwang-Ho You,Dae-Woong Kim,Hong-Young Chang,
来源：2011年第三届微电子及等离子体技术国际会议 年份：2011
Wave-cutoff method is an electron density measurement tool.In this method,an electron density can be acquired from the transmission spectra analysis of plasma....
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