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[期刊论文] 作者：AndreasPflug,MichaelSiemers,ThomasMelzig,DanielRademacher,TobiasZickenrott,MichaelVergohl,
来源：ChineseOpticsLetters 年份：2013
A novel optimization procedure for optical precision sputter coaters with respect to the film homogeneity is demonstrated. For a coater concept based on dual cylindrical sputtering sources and a rotating turn-table as sample-holder, the inh......
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