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[会议论文] 作者：Daeho You,S. K. Ahn,Hong-Young Chang,
来源：2011年第三届微电子及等离子体技术国际会议 年份：2011
Transformer Coupled Plasma(TCP) is different from well known Inductively Coupled Plasma(ICP),because the former has a magnetic core between the primary coil and the secondary coil....
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