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High-performance waveguide-integrated germanium PIN photodiodes for optical communication applicatio
[期刊论文] 作者：LeopoldVirot,LaurentVivien,Jean-MarcFedeli,YannBogumilowicz,Jean-MichelHartmann,FredericBoeuf,PaulCrozat,
来源：PhotonicsResearch 年份：2013
This paper reports on high-performance waveguide-integrated germanium photodiodes for optical communications applications. 200 mm wafers and production tools were used to fabricate the devices. Yields over 97% were obtained for three differ......
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