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[会议论文] 作者：T. L. Ni,
来源：2011年第三届微电子及等离子体技术国际会议 年份：2011
A pulsed dc glow discharge plasma was formed with the power of 15 kW under the high gas pressures about 200 Torr.The discharge features of the DC plasma were investigated by using optical emission spe...
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