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[会议论文] 作者：W CLang,J Q Xiao,J Gong,C Sun,R F Huang,L S Wen,
来源：第四届国际表面与界面科学与工程学术会议(The Fourth International Conference on S 年份：2009
Macroparticles (MPs) reduction is the main subject in the process of arc ion plating and there are many process parameters affect the MPs distribution on the resultant films.However,the effects of pro...
Design and performance of,the transverse rotating magnetic field steered arc source used in vacuum a
[会议论文] 作者：W C Lang,J Q Xiao,J Gong,C Sun,R F Huang,L S Wen,
来源：第四届国际表面与界面科学与工程学术会议(The Fourth International Conference on S 年份：2009
In our design,the concept of static magnetic field is given up and the idea of controlling the arc discharge by transverse rotating magnetic field (TRMF) is...
Effects of axisymmetric magnetic field on the motion of cathode spot and distribution of Macropartic
[会议论文] 作者：W C Lang,J Q Xiao,J Gong,C Sun,R F Huang,L S Wen,
来源：第四届国际表面与界面科学与工程学术会议(The Fourth International Conference on S 年份：2009
TiN and (Ti,Al) N films were prepared by axisymmetric magnetic field (AMF) enhanced arc ion plating (ALP).Based on the results of finite element method (FEM) simulation and the physical mechanism of t...
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