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[期刊论文] 作者：WANG Zhan-shan WANG Feng-li ZH,
来源：光学精密工程 年份：2005
To develop beam splitters for soft X-ray laser Michelson interferometer at 13.9 nm, Mo/Si multilayers of 100 nm thickness deposited on both sides of silicon nit...
[期刊论文] 作者：WANG Zhan-Shan,WANG Feng-li,ZH,
来源：光学精密工程 年份：2004
To develop beam splitters for soft X-ray laser Michelson interferometer at 13.9 nm, Mo/Si multilayers of 100 nm thickness deposited on both sides of silicon nit...
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