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通过Nd：YAG激光器四倍频266nm偏振脉冲激光的扫描曝光，在聚酰亚胺表面制得了大面积的精度为0.2μm的周期性纳米线条。实验结果表明：随着激光能量密度的增加，纳米线条的深度增加；线条的周期性和入射光的角度符合关系式；周期性纳米线条的方向始终平行于偏振激光束的偏振平面方向；在20°入射角、40mW激光功率时能得到较理想的线条高宽比。
By scanning Nd: YAG laser with 266W polarized pulsed laser, a large area of periodic nanowire with a precision of 0.2μm was fabricated on the surface of polyimide. The experimental results show that the depth of the nanowire increases with the increase of the laser energy density. The periodicity of the line and the angle of the incident light conform to the relation. The direction of the periodic nanowire is always parallel to the polarization plane of the polarized laser beam. ° Angle of incidence, 40mW laser power can get a better line aspect ratio.