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利用激光诱导化学镀技术,首次在硅片上沉积出金属镍。研究了沉积速率与各实验参量的关系,并对积沉斑的形状进行了分析和讨论。
The use of laser-induced electroless plating technology, for the first time deposited on the silicon metal nickel. The relationship between deposition rate and each experimental parameter was studied, and the shape of deposition spot was analyzed and discussed.