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使用原子力显微镜对由微波等离子体电子回旋共振化学气相沉积技术制备的超薄类金刚石薄膜的纳米摩擦性能进行了研究。结果表明:氢化非晶碳膜(a C∶H)的摩擦力和外加载荷基本成线性关系,可以使用修正的Amonton公式进行表征;厚度在64.9nm以下薄膜的微观承载性能和膜厚存在明显的正比例关系。通过分析磨损深度和循环次数之间的关系以及对磨损区域的导电性研究,表明a C∶H膜表层的微观承载性能较其内层相差很大,表面存在着一层软膜。
Atomic force microscopy was used to study the nanocomposites of ultrathin diamond-like carbon films prepared by microwave plasma electron cyclotron resonance chemical vapor deposition. The results show that the frictional force of hydrogenated amorphous carbon film (a C:H) is basically linear with the applied load and can be characterized by the modified Amonton formula. The microstructure and film thickness of the film with the thickness of 64.9nm are obvious Proportionality. By analyzing the relationship between the depth of wear and the number of cycles, and the conductivity of the worn area, it is shown that the microcarrier performance of a C: H film is quite different from that of its inner layer, and a soft film exists on the surface.