在ＶＬＳＩ电路中，版图设计的层次化、微细化及气泡结构等，使互连寄生电容器更为复杂。重点介绍在直接边界元法计算中，应用稀疏矩阵存储技术有效组织离散化方程组系数矩阵，以期快速、精确地进行多介质嵌套寄生电容的计算。同时，利用直接边界元法的局部化性质，以多介质的组织方式加速单介质计算，算例表明，加速可达一个数量级。 In the VLSI circuit, the layout of the layout design, miniaturization and bubble structure, etc., to interconnect the parasitic capacitors more complex. In the calculation of direct boundary element method, the sparse matrix storage technique is used to effectively organize the coefficient matrix of discretized equations, so as to calculate the nested capacitance of multi-media neatly and accurately. In the meantime, using the localized nature of the direct boundary element method, the multi-media organization accelerates the single-medium calculation. The example shows that the acceleration can reach an order of magnitude.