一、概况自60年代以来,由于无线电技术、自动控制及国防军事科学的发展,促进了微波半导体器件的发展。20年来,微波半导体器件发展非常迅速。初期,微波器件只有点接触式检波器,而目前商用的产品已有包括截止频率高达若干GHz的GaAs检波器,直至在1GHz下连续功率输出几十瓦的双极晶体管。迄今,微波器件已成为半导体领域的一个重要分支,各种高性能的器件相继出现,并开始应用到各种电子设备中。由于微波半导体器件具有小型、轻量、耗电省和可靠性高等优点,因而在军事、工业、农业和科学等各个方面都得到广泛应用。卫星运行、天空飞机翱翔、地面雷达运转、微波中继通信……,凡此种种,都离不开微 I. Overview Since the 1960s, the development of microwave semiconductor devices has been promoted due to the development of radio technology, automatic control and national defense military science. Over the past 20 years, microwave semiconductor devices have developed very rapidly. Initially, microwave devices had only point-contact detectors and currently commercial products have included GaAs detectors with cutoff frequencies up to several GHz up to tens of watts of bipolar transistors with continuous power output at 1 GHz. So far, microwave devices have become an important branch of the semiconductor field, a variety of high-performance devices have emerged, and began to apply to a variety of electronic devices. Due to their small size, light weight, low power consumption, and high reliability, microwave semiconductor devices are widely used in military, industrial, agricultural and scientific fields. Satellite operation, soaring sky aircraft, ground radar operation, microwave relay communications ... ..., all these are inseparable from the micro