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非制冷红外探测器具有广阔的军事和民用前景。近年来,出现了一类性能优越的新型双层微测辐射热计型红外探测器。利用有限元分析方法和光学导纳矩阵法详细研究了两种类型的双层微测辐射热计的主要性能。结果表明,双层微测辐射热计的综合性能优于单层微测辐射热计。其中,双层S型结构的温升最优,但其力学稳定性较差,难以满足实践需要;双层U型结构的温升虽低于双层S型结构的温升,但明显优于单层微桥;重要的是,双层U型结构在光吸收性能、力学稳定性、器件制造等方面均优于双层S型结构。所以,双层U型结构的综合性能更优。还设计了一种综合性能更优的改进型双层U型结构。
Uncooled infrared detectors have broad military and civilian prospects. In recent years, there has been a new type of double-layer microbolometer infrared detector with superior performance. The main properties of two types of double-layer microbolometers are studied in detail using finite element analysis and optical admittance matrix methods. The results show that the overall performance of the two-layer microbolometer is better than the single-layer microbolometer. Among them, the temperature rise of double S-type structure is the best, but its mechanical stability is poor, which is difficult to meet the practical needs. Although the temperature rise of double-layer U-shaped structure is lower than that of double S-type structure, Single-layer micro-bridge; importantly, the double U-shaped structure is superior to the double S-shaped structure in light absorption performance, mechanical stability, device manufacturing and so on. Therefore, the overall performance of double U-shaped structure is better. Also designed an improved overall performance of the improved double U-shaped structure.