利用ＹＡＧ脉冲激光在二种脉宽下（１０ｎｓ、２５０μｓ），对Ｓｉ、Ｇｅ片进行了损伤研究，分别给出了表面损伤机制，并利用镀金钢石膜、介质膜和激光预辐照进行加固，讨论了加固效果。 The YAG pulsed laser was used to study the damage of Si and Ge films under two kinds of pulse widths (10 ns, 250 μs). The damage mechanisms of the films were given respectively. The surface damage mechanism was reinforced by using Gamma-coated steel film, dielectric film and laser pre-irradiation , Discussed the reinforcement effect.