论文部分内容阅读
详细观察了与沉积条件有关的金刚石形貌变化 ,讨论了直流等离子射流沉积金刚石膜的生长机理 .根据晶体的表面能 ,在碳化物上先生成金刚石八面体晶粒 ,而金刚石最后的生长形状是八面体、立方八面体、立方体还是其中间形式 ,则取决于 ( 111)面和 ( 10 0 )面的相对生长速度 .( 111)面可分解成 ( 110 )面和 ( 10 0面 ) ,有时由于这两个面生长不平衡 ,就在 ( 111)面上出现凹坑或宏观台阶或宏观断裂 .用这个生长机理可以解释金刚石的生长形貌 .
The changes of diamond morphology related to the deposition conditions were observed in detail, and the growth mechanism of diamond films deposited by direct current plasma jet deposition was discussed.According to the surface energy of the crystal, diamond octahedron grains were firstly formed on the carbide and the final growth shape of the diamond was The octahedron, cubo-octahedron, cube or its intermediate form depends on the relative growth rate of the (111) plane and the (100) plane. The (111) plane is decomposable into (110) planes and Due to the unbalanced growth of these two surfaces, pits or macroscopic steps or macroscopic faults appear on the (111) plane, which can explain the growth morphology of diamond.