引言半导体传感器是随着半导体技术的发展而兴起的。由于它灵敏度高、响应速度快、可靠性强、具有小型化等重要特点,正以惊人的速度渗透到各种实际的测量和控制系统中去。仅仅十多年的时间,国外的半导体传感器已经发展到六大类,共有几百种类型的传感元件。随着新的半导体传感元件的出现和性能的提高,半导体传感器日益广泛地应用于宇宙探 Introduction Semiconductor sensors are emerging as the semiconductor technology evolves. Because of its high sensitivity, fast response, high reliability, and other important features such as miniaturization, are at an alarming rate infiltrated into a variety of actual measurement and control system to go. Just ten years time, foreign semiconductor sensors have been developed into six categories, a total of hundreds of types of sensor. With the advent of new semiconductor sensing elements and improved performance, semiconductor sensors are increasingly used in cosmic exploration