本文叙述在钛溅射离子泵超高真空系统上利用小型180°磁质谱计(Zh-3型)所做的剩余气体分析的实验。系统采用全金属密封、带冷阱的机械泵预抽,通过有机溶剂的清洗和氮气辉光放电以及中温烘烤等处理获得超高真空。对系统的各压强下的气体成分以及B-A规的影响作了分析。根据实验结果,讨论了剩余气体成分对获得超高真空等影响。 This paper describes experiments on residual gas analysis using a small 180 ° magnetometer (Zh-3 type) on a titanium sputter ion pump ultra-high vacuum system. The system uses a fully metal sealed, pre-pump with a cold trap mechanical pump to achieve ultrahigh vacuum through organic solvent cleaning and nitrogen glow discharge and medium temperature baking. The effects of gas composition and B-A gauge at each pressure of the system were analyzed. According to the experimental results, the influence of residual gas composition on the ultra-high vacuum is discussed.