分别在普通的低阻硅衬底、带有3μm厚氧化硅介质层的低阻硅衬底和高阻硅衬底上设计并制备了微波传输共面波导.结果表明,低阻硅衬底导致过高的微波损耗从而不能使用,通过加氧化硅介质层,微波损耗可以大大减少,但是需要较厚的氧化硅厚度.直接制备在高阻硅衬底上的共面波导在所测试的26GHz的频率范围内获得低于2dB/cm的微波损耗,而且工艺十分简单. Microwave transmission coplanar waveguides were designed and fabricated on a common low resistance silicon substrate, a low resistance silicon substrate with a 3μm thick silicon oxide layer and a high resistance silicon substrate, respectively. The results show that the low resistance silicon substrate results in Excessively high microwave loss can not be used, microwave loss can be greatly reduced by adding a silicon oxide dielectric layer, but a thicker silicon oxide thickness is required Direct coplanar waveguide fabricated on a high resistivity silicon substrate In the tested 26 GHz Microwave loss in the frequency range below 2dB / cm is achieved, and the process is very simple.