【摘 要】
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A new method to measure the conductivity of conducting thin films in a contactless fashion was demonstrated. A microwave compact equipment working at 94 GHz was
【机 构】
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Department of Mechanical Engineering
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A new method to measure the conductivity of conducting thin films in a contactless fashion was demonstrated. A microwave compact equipment working at 94 GHz was used to measure the amplitude of the reflection coefficient of the microwave signal. Indium Tin Oxide films having conductivity of 8.20×104～8.02×105 S/m on the glass substrates were used as the samples. An evaluation equation was built to determine the conductivity from the measured amplitude of the reflection coefficient. The evaluated conductivity of conducting thin films agrees well with their actual value.
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