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介绍了一种光强正交调制式新型线性位移检测方法。该方法采用基于光强正交变化的两路电驻波合成电行波信号,将空间位移的变化调制到电行波信号相位差的变化上,用鉴相的方法实现空间位移的测量。为了优化传感参数并提高测量精度,对传感器不同参数条件下光场分布情况与误差特性进行了研究。根据其结构特征,对光场分布引起的测量误差进行分析,并利用Tracepro软件建立三维光场仿真模型,对不同参数条件下光场分布进行分析;再通过实验验证,得到不同参数与误差特性之间的关系;根据仿真和实验结果,对传感器参数进行优化设计。初步实验表明:在108mm测量范围内,传感器精度达到±0.5μm。为此新型传感器优化设计和精度提高提供了可靠的理论依据和技术支持。
A new type of linear displacement detection method based on orthogonal modulation of light intensity is introduced. In this method, two lines of electric standing waves based on orthogonal variation of light intensity are used to synthesize electrical traveling wave signals, and the changes of spatial displacement are modulated to changes of the phase difference of the electrical traveling wave signals, and the space displacement measurement is realized by the phase discrimination method. In order to optimize the sensor parameters and improve the measurement accuracy, the light field distribution and error characteristics of the sensor under different parameters are studied. According to its structural characteristics, the measurement error caused by the distribution of light field is analyzed, and the three-dimensional light field simulation model is established by using Tracepro software to analyze the light field distribution under different parameters. The experimental results show that different parameters and error characteristics According to the simulation and experimental results, the sensor parameters are optimized. Preliminary experiments show that: in the 108mm measurement range, the sensor accuracy of ± 0.5μm. This new sensor optimization design and accuracy to provide a reliable theoretical basis and technical support.