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主要探究了在传感器采样频率较高(如高速相机、位置传感器)、倾斜镜动态特性不可忽略的情况下,如何基于实验数据建立开环倾斜镜系统的动态耦合数学模型的问题。分析了系统的动态特性以及输入与输出之间的耦合,提出了基于倾斜镜系统的输入输出数据、采用子空间辨识算法建立倾斜镜系统动态耦合数学模型的方法,并通过实验评估了模型的准确性和建模方法的可行性。实验结果显示,通过该方法所建立的倾斜镜动态耦合模型的VAF值达到95%,模型准确性相比传统的静态模型有了很大提高,验证了建模方法的可行性。研究成果可用于闭环倾斜镜系统优化反馈控制器的设计,提高系统对于光束偏移矫正的性能。
This paper mainly discusses how to establish the dynamic coupling mathematical model of open-loop tilting mirror system based on experimental data under the condition of high sampling frequency (such as high-speed camera and position sensor) and the dynamic characteristics of tilting mirror can not be neglected. The dynamic characteristics of the system and the coupling between the input and the output are analyzed. The input / output data based on the tilt mirror system is proposed. The method of establishing the dynamic coupling mathematical model of the tilt mirror system by using the subspace identification algorithm is given. The accuracy of the model is evaluated experimentally Feasibility of sex and modeling methods. The experimental results show that the dynamic coupling model of tilt mirror established by this method has a VAF value of 95%. The model accuracy is greatly improved compared with the traditional static model, which verifies the feasibility of the modeling method. The research results can be used to optimize the design of feedback controller for closed-loop tilt mirror system and improve the performance of the system for beam offset correction.