This paper describes measurement of Vapor-liquid equilibrium (VLE) data of methyldichlorosilane-methyltrichlorosilane-dimethyldichlorosilane system and that of the three binary systems at 101.325 kPa with a new pump-ebulliometer. The equilibrium composition of the vapor phase was calculated from pTx by indirect method. The model parameters of the liquid activity coefficient of the Wilson, NRTL, Margules and van Laar equations was corrected by the least square method. The ternary system VLE data were predicted by the Wilson equation, with the calculated boiling points showing good agreement with the experimental data.