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采用多道激光透射封接技术,对大尺寸3.3高硼硅玻璃-可伐合金封接工艺进行了探索性研究,采用正交实验方法,实现了两种材料的可靠封接。确定了优化工艺参数:扫描速度为25mm/s,激光功率为100W,离焦量为+40mm,扫描次数2次。通过使用SEM、EDX以及激光其聚焦显微镜观测硼硅玻璃-可伐合金的激光封接断面,对比相图,就结合界面的特征和机理进行了初步分析,Fe_2SiO_4化合物的形成是两者能够可靠封接的主要原因,确定了两种材料的激光可封接性。
Using multi-channel laser transmission sealing technology, large-size 3.3 high borosilicate glass - Kovar alloy sealing process was exploratory research, using orthogonal experimental method to achieve a reliable sealing of the two materials. The optimized process parameters were determined: the scanning speed was 25mm / s, the laser power was 100W, the defocus amount was + 40mm and the scanning times were 2 times. By using SEM, EDX and laser focusing microscopy to observe the laser sealing section of borosilicate glass-kovar alloy, the phase diagram was compared and the characteristics and mechanism of the bonding interface were preliminarily analyzed. The formation of Fe_2SiO_4 compound was able to reliably seal The main reason for this is to determine the laser sealability of both materials.