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针对平板型表面波放电等离子体源,建立了表面波放电狭缝天线辐射电磁波模型,对狭缝天线辐射电磁场分布进行了三维数值计算,并与表面波电磁场进行对比分析,讨论了平板型表面波放电机理。结果表明:整个狭缝天线阵激发的电磁场是每个狭缝天线激发电磁场的线性叠加;狭缝天线阵直接激发的电磁场强度在临近波导壁面处很大,并且随着空间距离的增大迅速衰减;狭缝天线阵直接激发和表面波的电场均远大于各自的磁场,分析电、磁场对带电粒子的力作用时可以忽略磁场力的作用;表面波电磁场远大于狭缝天线阵直接辐射的电磁场,强电磁场范围也远大于狭缝天线阵直接激发的强电磁场范围,等离子体有增强电磁场强度、扩大强电磁场范围的作用。
Aiming at the flat-type surface wave discharge plasma source, the electromagnetic radiation model of the surface wave discharge slit antenna was established. The three-dimensional numerical calculation of the radiation electromagnetic field distribution of the slit antenna was made and compared with that of the surface wave electromagnetic field. Discharge mechanism. The results show that the electromagnetic field excited by the whole slot antenna array is a linear superposition of the electromagnetic field excited by each slot antenna. The strength of the electromagnetic field excited directly by the slot antenna array is very large near the wall of the waveguide and decays rapidly as the space distance increases ; The excitation of the slit antenna array and the electric field of the surface wave are much larger than the respective magnetic fields; the electromagnetic field can be neglected when the force of the electric and magnetic fields on the charged particles can be neglected; the electromagnetic field of the surface wave is far greater than the electromagnetic field directly radiated by the slot antenna array , The range of strong electromagnetic field is far greater than the range of strong electromagnetic field directly excited by the slit antenna array, and the plasma has the effect of enhancing the electromagnetic field strength and expanding the range of strong electromagnetic field.