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半导体的加工过程对工程技术人员分别提出了耐热、耐化学介质、超纯净等方面的要求,不同的Kalrez密封件可满足这些要求。该文介绍了不同Kalrez胶料的性能及其在半导体工业中的选择原则,概述了Kalrez胶料在半导体工业常用化学介质中的性能。
Semiconductor processing engineers and technicians were put forward the heat resistance, chemical resistance, ultra-pure and other requirements, different Kalrez seals to meet these requirements. This paper presents the properties of different Kalrez compounds and their selection principles in the semiconductor industry. It outlines the properties of Kalrez compounds in common chemical media used in the semiconductor industry.