采用磁控溅射和化学气相沉积技术制备出二氧化硅纳米花。利用扫描电子显微镜(SEM),X射线光电子能谱(XPS)和傅里叶红外吸收谱(FTIR)对上述纳米结构进行结构表征。用荧光光谱仪(PL)对其光致发光特性进行了研究。结果表明在激发波长为325nm时,在394nm处出现一个发光峰,表现出良好的发光特性。 Silica nanoflowers were prepared by magnetron sputtering and chemical vapor deposition. The above nanostructures were characterized by SEM, XPS and FTIR. The photoluminescence (PL) properties were studied by fluorescence spectroscopy. The results show that at an excitation wavelength of 325nm, a luminescence peak appears at 394nm, showing good luminescence properties.