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研究了月球表面高温、强辐射的空间环境下Mo/Si多层膜的热稳定性和辐照稳定性。Mo/Si多层膜采用磁控溅射法镀制,将制备好的多层膜在100℃和200℃高温下加热,利用激光等离子体反射率计和X射线衍射仪(XRD)对加热前后的多层膜进行了测量。结果显示在200℃以内,多层膜反射率和中心波长没有显著变化,表现出良好的热稳定性。利用Monte Carlo方法模拟了质子在多层膜内造成的缺陷的分布和浓度分布。模拟显示,能量大的质子沉积在多层膜内部,造成的缺陷也集中在多层膜内部。用能量为60keV,剂量分别为3×1012 cm-2和3×1014 cm-2的质子对Mo/Si多层膜进行辐照实验。发现多层膜内部出现了烧蚀损伤缺陷及节瘤缺陷。结果表明能量相同时,辐照剂量越大对多层膜反射率影响越大。
The thermal stability and the radiation stability of Mo / Si multilayers under the high temperature and strong radiation of the lunar surface were studied. The Mo / Si multi-layer film was prepared by magnetron sputtering. The prepared multi-layer film was heated at 100 ℃ and 200 ℃. The laser power was measured by laser plasma reflectometer and X-ray diffractometer (XRD) Multilayer film was measured. The results show that the reflectivity and center wavelength of the multilayer film do not change significantly under 200 ℃, showing good thermal stability. The Monte Carlo method was used to simulate the distribution and density distribution of defects caused by protons in the multilayer films. Simulations show that energetic protons are deposited inside the multilayer film and defects are also concentrated in the interior of the multilayer film. The Mo / Si multilayers were irradiated with 60keV energy and proton at 3 × 1012 cm-2 and 3 × 1014 cm-2, respectively. It was found that the multi-layer film appeared ablation damage defects and tumor-bearing defects. The results show that the same energy, the radiation dose greater impact on the multilayer film reflectance.