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用 TEA CO2 激光的被原料吸收或不被吸收的不同谱线辐照几种物质 ,如四甲基硅烷 ,三甲基氯硅烷 ,六甲基二硅胺烷等 ,比较其反应情况与产物的异同。认为对于振动基态透明的物质 ,可以由激光引发气体级联电离的机制生成高活性的低温等离子体从而诱发化学反应 ,同样可以合成超细粉 ,而不受物质吸光性的限制。因此激光方法的原料范围可大为拓宽。本文对影响这类反应和产物的诸因素如激光功率密度、外电场、稀释气体、原料分子的化学组成及电离电位等进行了讨论。
TEA CO2 laser by the raw material is absorbed or not by the absorption of different spectral lines several substances, such as tetramethylsilane, trimethylchlorosilane, hexamethyldisilazane, etc., comparing the reaction conditions and the product of Similarities and differences. It is considered that for the material with vibration ground state transparent, the high-activity low-temperature plasma can be generated by the mechanism of laser-induced gas cascade ionization to induce chemical reaction, and the fine powder can also be synthesized without being limited by the matter absorbance. Therefore, the laser range of raw materials can be greatly broadened. In this paper, the factors affecting the reaction and product such as laser power density, external electric field, diluent gas, chemical composition of raw materials and ionization potential were discussed.