重点讨论了像元尺寸为11μm×11μm的4096×4096元可见光CCD全帧转移结构和技术性能参数的设计,采用CCD埋沟工艺和辐射加固技术,研制出了高性能4096×4096元可见光CCD。结果表明器件动态范围达到75dB,读出噪声电子数为30,暗电流产生率为2mV/s,响应非均匀性为2%,非线性为0.4%,且具有抗γ射线辐射能力。 Focusing on the design of full-frame transfer structure and technical performance parameters of 4096 × 4096 CCD with a pixel size of 11μm × 11μm, a CCD with high performance of 4096 × 4096 yuan has been developed by using CCD buried furrow technique and radiation reinforcement technology. The results show that the dynamic range of the device is 75dB, the number of readout noise electrons is 30, the dark current generation rate is 2mV / s, the response inhomogeneity is 2% and the nonlinearity is 0.4%.