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高速高灵敏接收模块是10Gb/s光传输系统的关键部件。《Electronics Letters》1992年第3期报道了日本NEC公司光电研究实验室用AlGaAs/GaAs HBT前置放大IC的10Gb/s光接收模块。模块中的AlGaAs/GaAs HBT用自对准方法制造。采用了厚发射极接触金属和InGaAs帽层两项措施,使发射极接触电阻比较低且均匀性好,因此,导致基区开通电压、电流增益和跨导有较好的均匀性。发射极面积为2×10μm~2,器件的截止频率 f_T和最高振荡频率f_(max)分别为41GHz和44GHz。
High-speed, highly sensitive receiver module is a key component of 10Gb / s optical transmission system. “Electronics Letters” 1992 the third period reported Japan NEC photoelectric research laboratory with AlGaAs / GaAs HBT preamplifier IC 10Gb / s optical receiver module. AlGaAs / GaAs HBT in the module is fabricated using a self-aligned method. The thick emitter contact metal and the InGaAs cap layer are used in two measures to make the emitter contact resistance relatively low and good uniformity, resulting in a better uniformity of the base turn-on voltage, current gain and transconductance. Emitter area of 2 × 10μm ~ 2, the device cutoff frequency f_T and the maximum oscillation frequency f_max are 41GHz and 44GHz.