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研制了一种基于自聚焦超晶格薄膜电光波导调制器。首先给出了自聚焦超晶格薄膜电光特性的测量和器件结构的优化设计,采用测量二次谐波生成值对入射角的依赖关系测定了薄膜的有效电光系数,保证了器件的设计精确有效。利用多层膜传输理论研究了器件电极对光波的最大吸收,并对器件结构进行了优化,获得了最小调制电压。其次给出了所加工的实验模型结构和扫描电子显微镜(SEM)图片,确保了加工质量和设计结果的一致。研究结果表明:这种无需外电场极化处理的新型聚合物薄膜电光调制器加工难度小,并且光学损耗优化到了1.0dB/cm。
A self-focusing superlattice thin film electro-optic waveguide modulator was developed. The electro-optical properties of the self-focusing superlattice film and the optimal design of the device structure are given first. The dependence of the second harmonic generation value on the incident angle is measured to determine the effective electro-optic coefficient of the thin film, so that the design of the device is accurate and effective . The multi-film transmission theory was used to study the maximum absorption of light waves by the device electrodes. The device structure was optimized and the minimum modulation voltage was obtained. Second, the structure of the experimental model and the scanning electron microscope (SEM) images are given to ensure the consistency of the processing quality and design results. The results show that the new polymer film electro-optic modulator without external electric field polarization is difficult to process and the optical loss is optimized to 1.0dB / cm.