论文部分内容阅读
N-type LaAlO3-δ thin films are epitaxially grown on p-type Si substrates. An enhancement mode field-effect transistor is constructed with oxygen deficient LaAlO3-δ as the source and drain, p-type Si as the semJconducting channel, and SiO2 as the gate insulator, respectively. The typical current-voltage behavior with field-effect transistor characteristic is observed. The ON/OFF ratio reaches 14 at a gate voltage of 10 V, the field-effect mobility is 10cm2/V.s at a gate voltage of 2 V, and the transconductance is 5 × 10-6 A/V at a drain-source voltage of 0.8 V at room temperature. The present field-effect transistor device demonstrates the possibility of realizing the integration of multifunctional perovskite oxides and the conventional Si semiconductor.