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在与小功率全Ａｒ－ＩＣＰ类似的条件下，使用顺序扫描等离子体光谱仪，用Ｓｔａｒｋ加宽法，选择Ｈβ（４８６．１ｎｍ）谱线，测定了空气－氩气混合气冷却ＩＣＰ中在感应线圈上０、２、５、１０ｍｍ处电子密度的侧向分布并将其中部分侧向分布经Ａｂｅｌ变换为径向分布。结果表明，空气－氩气混合气冷却ＩＣＰ中电子密度分布与全Ａｒ－ＩＣＰ相似，呈离轴峰；随着冷却气中空气含量的增加，离轴峰位置更靠近中心轴；当冷却气中含空气５％～１０％时，电子密度数值最大且大于全Ａｒ－ＩＣＰ中的数值。
In a similar condition to the low-power full Ar-ICP, using a sequential scanning plasma spectrometer, the Stark broadening method was used to select the Hβ (486.1 nm) line and the air-to- On the 0,2,5,10 mm electron density at the lateral distribution and part of the lateral distribution by Abel transform radial distribution. The results show that the distribution of electron density in the air-argon mixture cooled ICP is similar to that of the whole Ar-ICP, and is off axis. With the increase of the air content in the cooling gas, the position of the off-axis peak is closer to the central axis. With 5% to 10% air, the electron density is the largest and larger than that in the whole Ar-ICP.