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阐述了脉冲激光沉积法的基本原理、特点及其应用。分别介绍了超快脉冲激光沉积法、双光束脉冲激光沉积法、脉冲激光气相沉积法、脉冲激光液相沉积法、脉冲激光诱导晶化法、直流放电辅助脉冲激光沉积法、脉冲激光分子束外延法的原理及最新研究成果。展望了脉冲激光沉积法制备无机发光薄膜的发展趋势。
The basic principle, characteristics and application of pulsed laser deposition are described. The effects of ultrafast pulse laser deposition, double beam pulsed laser deposition, pulsed laser vapor deposition, pulsed laser liquid deposition, pulsed laser induced crystallization, DC discharge assisted pulsed laser deposition, pulsed laser molecular beam epitaxy The principle of law and the latest research results. The development trend of inorganic thin films prepared by pulsed laser deposition is prospected.