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综述了目前大尺寸AMOLED显示的技术挑战,尤其是背板技术。然后论述了如何采用氧化物TFT新技术与LTPS和a-Si TFT的优势相结合制造大尺寸背板的最佳方案。通过对比传统准分子激光退火(ELA)LTPS和非晶铟-镓-氧化锌(a-IGZO)TFT的器件特性,特别揭示了氧化物TFT的挑战性技术。最后,展示了由a-IGZO TFT背板制造的12.1in WXGAAMOLED显示器原型机。
The technical challenges of the current large-size AMOLED display are summarized, especially the backplane technology. Then it discusses how to use the new oxide TFT technology with the advantages of LTPS and a-Si TFT to create the best solution for large size backplane. In particular, the challenging technologies of oxide TFTs are revealed by comparing device characteristics of conventional excimer laser anneal (ELA) LTPS and amorphous indium-gallium-zinc oxide (a-IGZO) TFTs. Finally, a prototype 12.1in WXGAAMOLED display made from a-IGZO TFT backplane is shown.