介绍了一种基于光散射原理的便携式内表面粗糙度测量仪。它利用半导体激光器为光源,用光电二极管阵列接收经粗糙表面调制的散射光带,通过测量该散射光的光学特征值,得出粗糙度参数。仪器的测量范围R8为0.005~1．6μm,测量相对误差δ＜5%,重复测量不稳定性小于±2%。可以对多种机械加工零件的内外表面进行非接触在线检测。 A portable surface roughness measuring instrument based on light scattering principle is introduced. The semiconductor laser is used as a light source, and the surface of the scattering light band modulated by the rough surface is received by a photodiode array. By measuring the optical characteristic value of the scattered light, the roughness parameter is obtained. The measuring range R8 is 0.005 ~ 1.6μm, the relative error δ is less than 5% and the repeatability is less than ± 2%. Can on a variety of machined parts of the internal and external surface for non-contact online testing.