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介绍了光纤法布里-珀罗(F-P)传感器的传统解调方法,系统地推导了针对非本征法布里-珀罗干涉型(EFPI)传感器解调的三波长数字相位解调法的解调原理,仿真和实验分析了三波长数字相位解调法的解调误差。仿真分析结果表明,相位偏离正交关系是限制解调的最主要因素,要保证解调误差在15 nm以内,腔长变化应小于在正交腔长处2μm的范围。采用3个独立的激光光源进行实验,实验结果表明,在正交腔长附近1μm范围内变化,解调腔长误差小于12 nm,重复性误差小于10 nm,解调具有良好的稳定性。
The traditional demodulation method of fiber Fabry-Perot (FP) sensor is introduced and the three-wavelength digital phase demodulation method for extrinsic Fabry-Perot interference (EFPI) sensor demodulation Demodulation principle, simulation and experimental analysis of the three-wavelength digital phase demodulation demodulation error. Simulation results show that the phase deviation from the orthogonal relationship is the most important factor to limit the demodulation. To ensure that the demodulation error is within 15 nm, the cavity length variation should be less than 2 μm in the orthogonal cavity length. Experiments using three independent laser sources show that the experimental results show that the error of cavity length is less than 12 nm and the repeatability error is less than 10 nm. The demodulation has good stability.