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磁悬浮转子真空计是一种先进的高精度真空规。我们研制的这种仪器技术指标可达到: 1.压强测量范围:1×10~(-4)～1.3Pa 2.压强测量的不确定性:±1×10~(-5)Pa 3.σ稳定性:优于1% 这样高的精度是与正确的设计思想、先进的结构以及高精度的测试电路分不开的。另一个重要的方面是数据处理技术,特别是在线的适时处理。本仪器由于采用了经过改进的微处理机作为实时数据处理器,具有测量精度高,处理时间短,测试结果能连续自动打印,仪器成本低等优点。由于软件编程的灵活性,根据使用需要还可以扩展测试处理功能,为进一步实现自动化测试打下基础。
Magnetic suspension rotor vacuum gauge is an advanced high-precision vacuum gauge. We developed this instrument technical indicators can be achieved: 1. Pressure measurement range: 1 × 10 ~ (-4) ~ 1.3Pa 2. Pressure measurement uncertainty: ± 1 × 10 ~ (-5) Pa 3.σ Stability: better than 1% This high accuracy is inseparable from the correct design, advanced structure and high-precision test circuit. Another important aspect is data processing technology, especially online and timely processing. The instrument uses an improved microprocessor as a real-time data processor, with high accuracy, short processing time, the test results can be automatically continuous printing, the advantages of low cost instruments. Due to the flexibility of software programming, test processing functions can also be extended according to usage needs, laying the foundation for further automated testing.