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采用溶胶 凝胶 (sol gel)工艺制备了Sb∶SnO2 /SiO2 复合膜。通过原子力显微镜 (AFM )观察了薄膜样品的表面形貌 ,利用紫外 可见光谱 ,p 偏振光反射比角谱研究了复合薄膜的光学特性。结果表明 ,薄膜中的晶粒具有纳米尺寸 (～ 35nm)的大小 ,比表面积大 ,孔隙率高 ;薄膜的透光率高 ,可见光波段近 95 % ;其光学禁带宽度约 3 6 7eV。因此Sb∶SnO2 /SiO2 纳米复合膜可作为气敏薄膜的理想选择。通过对三种不同的气体C3 H8,C2 H5OH及NH3气敏特性的测试表明 ,Sb掺杂大大提高了SnO2 薄膜对C2 H5OH的灵敏度 ,纳米Sb∶SnO2 /SiO2 复合膜的气敏灵敏度高于纯SnO2 薄膜及Sb掺杂的SnO2 薄膜
Sb: SnO2 / SiO2 composite films were prepared by sol-gel process. The surface morphology of the films was observed by atomic force microscopy (AFM). The optical properties of the films were investigated by UV-visible spectroscopy and p-polarization reflectance spectroscopy. The results show that the crystal grains in the film have the size of nanometer size (~ 35nm), large specific surface area and high porosity. The film has high light transmittance, near 95% of visible light band and an optical band gap of about 367eV. So Sb: SnO2 / SiO2 nanocomposite film can be used as an ideal gas-sensitive film. The gas sensitivities of C3H8, C2H5OH and NH3were measured by three different gases. The results showed that Sb doping greatly enhanced the sensitivity of C2H5OH to SnO2 thin films. The gas sensitivities of SbSnO2 / SiO2 composite films were higher than those of pure SnO2 thin film and Sb-doped SnO2 thin film