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采用溶胶-凝胶工艺用提拉法在石英基片上制备了具有优良的光学特性、高激光损伤阈值和均匀性良好的多孔二氧化硅单层增透膜和“有机硅-SiO2”双层增透膜系．考察了提拉速率对透射特性的影响，并比较了提拉法和液面下降法对所制备膜层的厚度的影响．透射光谱测量表明，在钕玻璃高功率激光的基频（1060um）、倍频和三倍频等重要激光波长处均得到较为理想的增透，透射率达到99％以上．
Sol-gel process using Czochralski method has been prepared on the quartz substrate with excellent optical properties, high laser damage threshold and uniformity of porous silicon dioxide single layer antireflection film and the "silicone-SiO2 double layer Through the membrane system. The influence of the pulling rate on the transmission properties was investigated. The effects of the Czochralski method and the liquid drop method on the thickness of the prepared films were compared. Transmission spectroscopy measurements show that the neodymium glass high power laser at the fundamental frequency (1060um), multiplier and third harmonic and other important laser wavelengths are more ideal by reflection, transmittance of more than 99%.