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制作了一种低成本硅基1.55μm可调谐共振腔增强型探测器.首次获得硅基长波长可调谐共振腔探测器的窄带响应,共振峰量子效率达44%,峰值半高宽为12.5nm,调谐范围14.5nm,并且获得1.8GHz的高频响应.本制作工艺不复杂,成本低,有望用于工业生产.
A low-cost silicon-based 1.55μm tunable resonator-enhanced detector was fabricated.The narrowband response of a silicon-based long-wavelength tunable resonator detector was obtained for the first time.The resonance peak quantum efficiency was 44% and the peak half-height width was 12.5nm , Tuning range of 14.5nm, and get a high frequency response of 1.8GHz. The production process is not complicated, low cost, is expected to be used for industrial production.