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根据分支波导定向耦合器的工作原理,并结合考虑MEMS刻蚀工艺,设计出一款应用于THz波段的10d B波导定向耦合器。该定向耦合器在传统的分支线结构上加以改进,将传统分支线耦合结构改进成新型“田”字型耦合结构,性能较好,并提高了可加工性。通过HFSS软件仿真,该定向耦合器在0.33~0.35THz频段内耦合度为10d B,隔离度达到30d B以上,各端口回波损耗小于-30d B,整体插损小于0.2d B。
According to the working principle of the branching waveguide directional coupler and considering the MEMS etching process, a 10d B waveguide directional coupler for the THz band is designed. The directional coupler is improved on the traditional branch line structure, and the traditional branch line coupling structure is improved into a new type “Tian” type coupling structure, which has better performance and improves workability. Through HFSS software simulation, the directional coupler has the coupling degree of 10d B in the frequency band of 0.33 ~ 0.35THz, the isolation degree reaches more than 30d B, the return loss of each port is less than -30d B, and the overall insertion loss is less than 0.2d B.