针对传统微泵结构复杂、制备困难等不足,提出了一种新型的基于激光冲击波力学效应的微泵驱动方法,使用该方法设计的微泵结构简单、易于制造、成本低,有利于微型化及与微机电系统(MEMS)集成。通过研究激光冲击波的力学模型,设计了无阀型微泵,并计算出其耦合模态。验证了该驱动方法的可行性;通过流固耦合仿真研究了激光的频率、占空比、功率密度、光斑直径等参数对微泵流量的影响,并进一步分析了流量的稳定性。研究结果表明,功率密度和光斑直径是影响流量的主要因素,占空比为0.6时微泵流量最大,微泵稳定工作后各脉冲流量相差不超过5%。 Aimed at the disadvantages of traditional micropumps, such as complex structure and difficult preparation, a new type of micropump driving method based on laser shock wave mechanics is proposed. The micropumps designed by this method are simple in structure, easy to manufacture, low in cost, Integrated with microelectromechanical systems (MEMS). By studying the mechanical model of laser shock wave, a valveless micropump is designed and its coupling mode is calculated. The feasibility of this driving method was verified. The effects of laser frequency, duty cycle, power density, spot diameter and other parameters on the micro-pump flow rate were studied by fluid-solid coupling simulation. The stability of flow rate was further analyzed. The results show that the power density and spot diameter are the main factors affecting the flow rate. When the duty cycle is 0.6, the micro-pump flow rate is the maximum, and the pulse flow rate after the micro-pump is stable does not differ by more than 5%.