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一、前言应用镀膜对金属进行保护以达到防磨损、防腐蚀的技术,最近得到飞跃的发展。镀膜方法有多种,最起始,应用挥发真空镀膜仪;挥发源用电热丝或电子束。用这方法所形成的薄膜粘着性较差。1963年马托克思(Mattox)首先报导了离子镀膜技术,此法所获薄膜,在致密度、均匀性上都超过上述物理挥发法所形成的薄膜。此外,离子镀
I. Preface The application of coating to protect metal to achieve anti-wear and anti-corrosion technology has recently achieved rapid development. There are a variety of coating methods, the most start, the application of volatile vacuum coating instrument; volatile electric wire or electron beam. Films formed by this method are less tacky. In 1963, Mattox first reported the ion-plating technology. The thin film obtained by this method surpassed the thin film formed by the physical evaporation method in terms of density and uniformity. In addition, ion plating