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设计并制备了窄带M o/S i多层膜反射镜。利用高反射级次和减小M o层厚度两种方法减小M o/S i多层膜反射镜光谱宽度。对M o层厚度分别为2 nm和3 nm的M o/S i多层膜,设计了反射级次分别从1到6的多层膜系。制备方法采用直流磁控溅射技术,在国家同步辐射光谱与计量站上测试。结果表明,带宽随着反射级次增加而减少,在同一反射级次,M o层厚度为2 nm的多层膜反射光谱带宽较小。
A narrow-band M o / S i multilayer mirror was designed and fabricated. The M 0 / S i multilayer mirror’s spectral width is reduced by two methods: high reflection level and decreasing M o layer thickness. For M o / S i multilayers with M o layer thicknesses of 2 nm and 3 nm, multilayer films with reflection orders of 1 to 6, respectively, were designed. The preparation method is DC magnetron sputtering technology and is tested on the national synchrotron radiation spectrum and measurement station. The results show that the bandwidth decreases with the increase of the reflection order, and the bandwidth of reflection spectrum of multi-layer film with M o layer thickness of 2 nm is smaller at the same reflection order.