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本文报道用离子束溅射法在单晶Si(100)衬底上沉积YBaCuO超导薄膜的实验结果。Y稳定ZrO_2层作为衬底和超导膜的中间层,具有良好的扩散阻止效果。薄膜具有强烈的c轴织构,其化学组成接近123相。薄膜的超导起始转变温度为100K,零电阻温度为78K。
This paper reports the experimental results of YBaCuO thin films deposited on single crystal Si (100) substrates by ion beam sputtering. Y stable ZrO 2 layer as the substrate and superconducting film intermediate layer, with good diffusion inhibition. The film has a strong c-axis texture, its chemical composition close to 123 phase. The initial transition temperature of the superconductor film is 100K and the zero resistance temperature is 78K.