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热释电非制冷红外焦平面探测器在军民领域具有广阔的应用前景。为了实现探测器的国内工程化研制,采用混成式技术,成功研制了基于锆钛酸铅(PZT)铁电陶瓷材料,像元尺寸为35μm×35μm,列阵规模为320×240元的非制冷红外焦平面探测器。通过自主设计,研发的非制冷焦平面测试平台,得到了此器件的基本性能参数平均电压响应率1.1×105V/W,平均探测率5.6×107cm·Hz1/2·W-1,并实现了该探测器热成像。结合实际的研究工作,较为系统地介绍和讨论了热释电非制冷红外焦平面研制过程中各项关键技术。在器件光电响应测试数据分析的基础上,进一步提出下一阶段研究工作的重点和器件性能优化的方向。
Pyroelectric uncooled infrared focal plane detectors in military and civilian fields has broad application prospects. In order to realize the domestic engineering development of the detector, a composite zirconate titanate (PZT) based ferroelectric ceramic material has been successfully developed by using hybrid technology. The pixel size is 35μm × 35μm, and the array size is 320 × 240 yuan Infrared focal plane detector. The average voltage response rate of this device is 1.1 × 105V / W and the average detection rate is 5.6 × 107cm · Hz1 / 2 · W-1 through self-designed and developed uncooled focal plane test platform. Detector thermal imaging. Combined with the actual research work, the key technologies in the development of pyroelectric uncooled infrared focal plane are systematically introduced and discussed. Based on the analysis of the test data of the photoelectric response of the device, further emphasis is put on the research focus of the next phase and the direction of device performance optimization.