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压电晶体 (PZT)光学移相器作为移相干涉仪 (PSI)的关键部件 ,其移相误差直接影响被测波面的相位复原精度。分析了压电晶体移相器在移相过程中导致干涉图旋转的原因———类进动 ,其本质是移相器在伸长的同时其参考镜端面法线方向绕着伸长方向产生旋转。利用典型的Hariharan五步移相算法 ,得出了类进动现象所导致的波面相位复原误差计算公式 ,给出了在测试孔径上的误差分布图。对影响误差大小的主要因素如干涉条纹的宽度、旋转的角度和测试口径等进行了具体分析 ,由此推导出在移相干涉仪光学调整过程中控制干涉图旋转误差的准则。
Piezoelectric crystal (PZT) optical phase shifter, as a key component of phase-shifting interferometer (PSI), has a direct impact on the phase recovery accuracy of the measured wavefront. The reason why the piezoelectric crystal phase shifter causes the interferogram to rotate during phase shifting is that the phase shift is essentially caused by the phase shifter extending while the normal direction of the reference mirror end face is generated around the elongation direction Rotate. Using the typical Hariharan five-step phase-shift algorithm, the formula of wavefront phase recovery error caused by the precession of a kind of classifier is obtained, and the error distribution in the test aperture is given. The main factors influencing the error, such as the width of the interference fringes, the angle of rotation and the test aperture are analyzed in detail, and the criterion of controlling the rotation error of the interferogram during the optical adjustment of the phase-shifted interferometer is deduced.