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1 引言对各种工业应用，紫外激光非常有用。放电抽运的准分子激光器是最有效的高功率紫外相干光源。近年来，许多实验室研制了用非线性光学晶体的固态激光器产生三次和四次（有时五次）谐波（用Ｎｄ∶ＹＡＧ激光器时，基波是１．０６μｍ），达到高功率紫外相干光。
1 Introduction UV laser is very useful for a variety of industrial applications. Discharge pumping excimer laser is the most effective high-power UV coherent light source. In recent years, many laboratories have developed solid state lasers using nonlinear optical crystals to produce three and four times (sometimes five) harmonics (1.06 μm fundamental with Nd: YAG lasers) to achieve high power UV coherent light .